On the effect of bakeout for the pumping speed dependence...

Vacuum 1996 Vol. 47; Iss. 6-8

On the effect of bakeout for the pumping speed dependence of outgassing rate in a stainless steel chamber

K Akaishi, Y Kubotaa, O Motojima, M Mushiaki, Y Funato
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Volume:
47
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0042-207x(96)00059-0
File:
PDF, 445 KB
english, 1996
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