Calculation of the Ga+ FIB Ion Dose Distribution by SEM...

Semiconductors 2020 / 12 Vol. 54; Iss. 12

Calculation of the Ga+ FIB Ion Dose Distribution by SEM Image

Mitrofanov, M. I., Voznyuk, G. V., Rodin, S. N., Lundin, W. V., Evtikhiev, V. P., Tsatsulnikov, A. F., Kaliteevski, M. A.
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Volume:
54
Journal:
Semiconductors
DOI:
10.1134/S1063782620120246
Date:
December, 2020
File:
PDF, 939 KB
2020
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