Theoretical study on the pumping mechanism of a dry scroll vacuum pump
Yu Su, Ta-i Sawada, Jun-ichi Takemoto, Shuji HagaVolume:
47
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0042-207x(96)00073-5
File:
PDF, 395 KB
english, 1996