Three-dimensional imaging of carbon clusters in thermally stable nickel silicides by carbon pre-implantation
Park, Iksoo, Seol, Jae Bok, Yoon, Gilsang, Lee, Jeong-SooVolume:
539
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2020.148152
Date:
February, 2021
File:
PDF, 4.92 MB
2021