Femtosecond laser micromachining in combination with ICP...

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Ceramics International 2020 / 11

Femtosecond laser micromachining in combination with ICP etching for 4H–SiC pressure sensor membranes

Wang, Lukang, Zhao, You, Yang, Zixuan, Zhao, Yulong, Yang, Xinwan, Gong, Taobo, Li, Cun
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Journal:
Ceramics International
DOI:
10.1016/j.ceramint.2020.10.220
Date:
November, 2020
File:
PDF, 13.18 MB
2020
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