Plasma deposition of parylene-C film

Materials Today Communications 2020 / 11

Plasma deposition of parylene-C film

Song, Zhiquan, Im, Ju-Hee, Ko, Hyuk, Park, Jun-Hee, Lee, Ga-Yeon, Kang, Min-Jung, Kim, Moo-Hwan, Pyun, Jae-Chul
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Journal:
Materials Today Communications
DOI:
10.1016/j.mtcomm.2020.101834
Date:
November, 2020
File:
PDF, 7.06 MB
2020
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