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Converting molecular layer deposited alucone films into Al 2 O 3 /alucone hybrid multilayers by plasma densification
Santo Domingo Peñaranda, Juan, Nisula, Mikko, Vandenbroucke, Sofie S. T., Minjauw, Matthias M., Li, Jin, Werbrouck, Andreas, Keukelier, Jonas, Pitillas MartÃnez, Andrea I., Dendooven, Jolien, DetaveYear:
2021
Journal:
Dalton Transactions
DOI:
10.1039/D0DT03896B
File:
PDF, 3.50 MB
2021