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Effect of argon and oxygen gas concentration on mode transition and negative ion production in helicon discharge
Sharma, N., Chakraborty, M., Saha, P. K., Mukherjee, A., Neog, N. K., Bandyopadhyay, M.Volume:
128
Journal:
Journal of Applied Physics
DOI:
10.1063/5.0025127
Date:
November, 2020
File:
PDF, 2.88 MB
2020