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[IEEE 2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC) - Tønsberg, Vestfold, Norway (2020.9.15-2020.9.18)] 2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC) - Layer Transfer Process Development For SiGe Based Microbolometer Integration
Kaynak, Canan Baristiran, Goeritz, Alexander, Krueger, Patrick, Voss, Thomas, Yamamoto, Yuji, Heinrich, Patrick, Saarow, Ulrike, Wietstruck, Matthias, Kaynak, MehmetYear:
2020
DOI:
10.1109/ESTC48849.2020.9229812
File:
PDF, 3.62 MB
2020