On the Effect of Water-Induced Degradation of Thin-Film...

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Journal of Microelectromechanical Systems 2020

On the Effect of Water-Induced Degradation of Thin-Film Piezoelectric Microelectromechanical Systems

Dahl-Hansen, Runar Plunnecke, Tyholdt, Frode, Gjessing, Jo, Vogl, Andreas, Wittendorp, Paul, Vedum, Jon, Tybell, Thomas
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Year:
2020
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2020.3031201
File:
PDF, 5.42 MB
2020
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