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[IEEE 2020 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Singapore, Singapore (2020.7.20-2020.7.23)] 2020 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Locating low-ohmic Variations in Resistance using Electron Beam Induced Voltage Imaging
Smith, Andrew J., Rummel, Andreas, Kemmler, Matthias, Schock, Klaus, Kleindiek, StephanYear:
2020
DOI:
10.1109/ipfa49335.2020.9260790
File:
PDF, 1.54 MB
2020