A study of the mechanisms of erosion in silicon single...

A study of the mechanisms of erosion in silicon single crystals using Hertzian fracture tests

Jyh-Woei Lu, Gordon A Sargent, Hans Conrad
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Volume:
186-187
Year:
1995
Language:
english
Pages:
12
DOI:
10.1016/0043-1648(95)07128-8
File:
PDF, 1.18 MB
english, 1995
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