Impact of Inductively Coupled Plasma Etching Conditions on...

Nanomaterials 2020 / 12 Vol. 10; Iss. 12

Impact of Inductively Coupled Plasma Etching Conditions on the Formation of Semi-Polar (\({11\overline{2}2}\)) and Non-Polar (\({11\overline{2}0}\)) GaN Nanorods

Coulon, Pierre-Marie, Feng, Peng, Wang, Tao, Shields, Philip
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Volume:
10
Journal:
Nanomaterials
DOI:
10.3390/nano10122562
Date:
December, 2020
File:
PDF, 5.66 MB
2020
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