Simultaneous thickness variation and surface profiling of...

Simultaneous thickness variation and surface profiling of glass plates using Fizeau interferometer with elimination of offset phase error

Bae, Wonjun, Kim, Yangjin, Moon, Young Hoon, Hibino, Kenichi, Sugita, Naohiko, Mitsuishi, Mamoru
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Volume:
480
Journal:
Optics Communications
DOI:
10.1016/j.optcom.2020.126500
Date:
February, 2021
File:
PDF, 2.62 MB
2021
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