Optimization and Fabrication of an MOEMS Gyroscope Based on...

Sensors 2020 / 12 Vol. 20; Iss. 24

Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator

Xia, Dunzhu, Zhang, Bing, Wu, Hao, Wu, Tao
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Volume:
20
Journal:
Sensors
DOI:
10.3390/s20247264
Date:
December, 2020
File:
PDF, 7.94 MB
2020
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