Development of a calibration system for wafer-type...

AIP Advances 2020 / 11 Vol. 10; Iss. 11

Development of a calibration system for wafer-type temperature sensor

Kim, Jongho, Mun, Jihun, Shin, Jae-Soo, Kang, Sang-Woo
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Volume:
10
Journal:
AIP Advances
DOI:
10.1063/6.0000536
Date:
November, 2020
File:
PDF, 5.41 MB
2020
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