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The role of implantation temperature and dose in the control of the microstructure of SIMOX structures
K.J. Reeson, A.K. Robinson, P.L.F. Hemment, C.D. Marsh, K.N. Christensen, G.R. Booker, R.J. Chater, J.A. Kilner, G. Harbeke, E.F. Steigmeir, G.K. CellerVolume:
8
Year:
1988
Language:
english
Pages:
24
DOI:
10.1016/0167-9317(88)90015-9
File:
PDF, 1.60 MB
english, 1988