Artificial epitaxy (graphoepitaxy) as an approach to the formation of SOI
E.I. Givargizov, A.B. LimanovVolume:
8
Year:
1988
Language:
english
Pages:
19
DOI:
10.1016/0167-9317(88)90021-4
File:
PDF, 1.30 MB
english, 1988