Chemical characterization of electronic microstructures...

Microelectronic Engineering 1989 Vol. 9; Iss. 1-4

Chemical characterization of electronic microstructures with sub-100 nm lateral resolution

Riccardo Levi-Setti, Jan M. Chabala, Philippe Hallegot, Yuh-Lin Wang
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Volume:
9
Year:
1989
Language:
english
Pages:
9
DOI:
10.1016/0167-9317(89)90086-5
File:
PDF, 4.73 MB
english, 1989
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