SEM investigation of semiconductors by the capacitance techniques
Vitaly V. Aristov, Oleg V. Kononchuk, Edward I. Rau, Eugeny B. YakimovVolume:
12
Year:
1990
Language:
english
Pages:
7
DOI:
10.1016/0167-9317(90)90031-n
File:
PDF, 531 KB
english, 1990