Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
1996 Vol. 377; Iss. 2-3
Process- and irradiation-induced defects in silicon devices
C. Claeys, E. Simoen, J. VanhellemontVolume:
377
Year:
1996
Language:
english
Pages:
14
DOI:
10.1016/0168-9002(95)01402-0
File:
PDF, 1.24 MB
english, 1996