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Growth of GaAs epitaxial layers prepared in the laboratory with an integrated safety MOCVD system
Tetsuji Imai, Shunro Fuke, Katsumi Mori, Kazuhiro KuwaharaVolume:
33-34
Year:
1988
Language:
english
Pages:
7
DOI:
10.1016/0169-4332(88)90356-x
File:
PDF, 291 KB
english, 1988