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Fabrication of micromechanical devices from polysilicon films with smooth surfaces
H. Guckel, J.J. Sniegowski, T.R. Christenson, S. Mohney, T.F. KellyVolume:
20
Year:
1989
Language:
english
Pages:
6
DOI:
10.1016/0250-6874(89)87109-4
File:
PDF, 783 KB
english, 1989