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Normally closed microvalve and mircopump fabricated on a silicon wafer
Masayoshi Esashi, Shuichi Shoji, Akira NakanoVolume:
20
Year:
1989
Language:
english
Pages:
7
DOI:
10.1016/0250-6874(89)87114-8
File:
PDF, 520 KB
english, 1989