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Low temperature growth of highly purified diamond films using microwave plasma-assisted chemical vapour deposition
Yasushi Muranaka, Hisao Yamashita, Hiroshi MiyaderaVolume:
47
Year:
1991
Language:
english
Pages:
12
DOI:
10.1016/0257-8972(91)90262-u
File:
PDF, 699 KB
english, 1991