Performance of the advanced MEVVA® IV 80-10 metal ion...

Surface and Coatings Technology 1992 Vol. 51; Iss. 1-3

Performance of the advanced MEVVA® IV 80-10 metal ion implantation system

James R. Treglio, G. Donald Magnuson, Robert J. Stinner
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Volume:
51
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(92)90296-m
File:
PDF, 951 KB
english, 1992
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