Superimposed pulse bias voltage used in arc and sputter...

Superimposed pulse bias voltage used in arc and sputter technology

W. Olbrich, G. Kampschulte
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Volume:
59
Year:
1993
Language:
english
Pages:
7
DOI:
10.1016/0257-8972(93)90096-7
File:
PDF, 825 KB
english, 1993
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