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Deposition of diamond and boron nitride films by plasma chemical vapour deposition
J.M. Albella, C. Gomez-Aleixandre, O. Sanchez-Garrido, L. Vazquez, J.M. Martinez-DuartVolume:
70
Year:
1995
Language:
english
Pages:
12
DOI:
10.1016/0257-8972(94)02272-r
File:
PDF, 1.07 MB
english, 1995