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Deposition of (Ti,Al)N films on A2 tool steel by reactive r.f. magnetron sputtering
Chi-Tung Huang, Jenq-Gong DuhVolume:
71
Year:
1995
Language:
english
Pages:
8
DOI:
10.1016/0257-8972(94)02320-p
File:
PDF, 684 KB
english, 1995