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Effects of MeV ion implantation on metal films
M. Ikeyama, K. Saitoh, S. Nakao, H. Niwa, S. Tanemura, Y. Miyagawa, S. MiyagawaVolume:
66
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(94)90018-3
File:
PDF, 524 KB
english, 1994