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Some mechanical and thermal properties of PECVD a-SixC1−x: H and a-SixN1−x: H films prepared by mixed frequency plasma processes
V.J. Minkiewicz, J. Stasiak, R.L. White, R.W. Cornell, J.O. Moore, R. Eaton, J.M. Eldridge, F.C. LeeVolume:
68-69
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(94)90165-1
File:
PDF, 410 KB
english, 1994