Thin TiN and TiB2 coatings with low residual stress...

Surface and Coatings Technology 1994 Vol. 68-69; Iss. none

Thin TiN and TiB2 coatings with low residual stress deposited at different temperatures by cathodic arc ion plating

Anthony J. Perry, Albert F. Tian, James R. Treglio, Chris Loomis
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Volume:
68-69
Year:
1994
Language:
english
Pages:
8
DOI:
10.1016/0257-8972(94)90212-7
File:
PDF, 625 KB
english, 1994
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