Acoustic emission and precision force-displacement observations of spherical indentations into TiN films on silicon
M. Shiwa, E.R. Weppelmann, A. Bendeli, M.V. Swain, D. Munz, T. KishiVolume:
68-69
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(94)90223-2
File:
PDF, 602 KB
english, 1994