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Plasma-activated high rate evaporation using a low voltage electron beam system
S. Schiller, G. Hoetzsch, M. Neumann, H. Morgner, O. ZywitzkiVolume:
68-69
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0257-8972(94)90254-2
File:
PDF, 1.07 MB
english, 1994