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Plasma-activated high rate electron beam evaporation using a spotless cathodic arc
K. Goedicke, B. Scheffel, S. SchillerVolume:
68-69
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(94)90256-9
File:
PDF, 667 KB
english, 1994