X-ray diffractometry analysis of r.f.-sputtered hard...

Surface and Coatings Technology 1995 Vol. 74-75; Iss. part-P1

X-ray diffractometry analysis of r.f.-sputtered hard coatings based on nitrides of Ti, Cr, Hf

C. Friedrich, G. Berg, E. Broszeit, K.-H. Kloos
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Volume:
74-75
Year:
1995
Language:
english
Pages:
7
DOI:
10.1016/0257-8972(95)08236-0
File:
PDF, 562 KB
english, 1995
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