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Plasma diagnostics for the control of reactive magnetron deposition process
F. Perry, B. Stauder, G. Henrion, Ph. PigeatVolume:
74-75
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(95)08334-0
File:
PDF, 407 KB
english, 1995