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Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing
Edward A. Rietman, Suresh H. Patel, Earl R. LoryVolume:
23
Year:
1996
Language:
english
Pages:
13
DOI:
10.1016/0305-0548(95)00062-3
File:
PDF, 853 KB
english, 1996