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ChemInform Abstract: A WSixN Diffusion Barrier Formed with Electron Cyclotron Resonance Nitrogen Plasma.
A. HIRATA, T. HOSOYA, K. MACHIDA, H. TAKAOKA, H. AKIYAVolume:
28
Year:
1997
Pages:
1
DOI:
10.1002/chin.199712251
File:
PDF, 29 KB
1997