Ion—molecule reactions in GeH4/SiH4 systems studied by ion...

Ion—molecule reactions in GeH4/SiH4 systems studied by ion trap mass spectrometry

L. Operti, M. Splendore, G.A. Vaglio, P. Volpe
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Volume:
49
Year:
1993
Language:
english
Pages:
8
DOI:
10.1016/0584-8539(93)80030-e
File:
PDF, 492 KB
english, 1993
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