Performance analysis of automated interbay...

Robotics and Computer-Integrated Manufacturing 1996 Vol. 12; Iss. 3

Performance analysis of automated interbay material-handling and storage systems for large Wafer Fab

Gino Cardarelli, Pacifico Marcello Pelagagge, Agostino Granito
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Volume:
12
Year:
1996
Language:
english
Pages:
8
DOI:
10.1016/0736-5845(96)00010-5
File:
PDF, 728 KB
english, 1996
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