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A novel fabrication method of Si mesoscopic structures on Al2O3 by selective epitaxial growth using electron beam irradiation
Shun-ichi Yanagiya, Hiroyuki Wado, Mamoru Yoshimoto, Makoto IshidaVolume:
227
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0921-4526(96)00432-2
File:
PDF, 331 KB
english, 1996