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Optically activated ZnO/Sio2/Si cantilever beams
J. Suski, D. Largeau, A. Steyer, F.C.M. Van de Pol, F.R. BlomVolume:
24
Year:
1990
Language:
english
Pages:
5
DOI:
10.1016/0924-4247(90)80062-a
File:
PDF, 478 KB
english, 1990