A thermopneumatic micropump based on micro-engineering...

Sensors and Actuators A: Physical 1990 Vol. 21; Iss. 1-3

A thermopneumatic micropump based on micro-engineering techniques

F.C.M. Van de Pol, H.T.G. Van Lintel, M. Elwenspoek, J.H.J. Fluitman
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Volume:
21
Year:
1990
Language:
english
Pages:
5
DOI:
10.1016/0924-4247(90)85038-6
File:
PDF, 438 KB
english, 1990
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