Characterization and modelling of silicon piezoresistive...

Sensors and Actuators A: Physical 1991 Vol. 27; Iss. 1-3

Characterization and modelling of silicon piezoresistive accelerometers fabricated by a bipolar-compatible process

Thomas Tschan, Nico de Rooij, Alex Bezinge, Ste´phane Ansermet, Jo¨rg Berthoud
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Volume:
27
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0924-4247(91)87058-b
File:
PDF, 963 KB
english, 1991
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