Silicon pressure sensor with integrated bias stabilization...

Sensors and Actuators A: Physical 1992 Vol. 30; Iss. 3

Silicon pressure sensor with integrated bias stabilization and temperature compensation

H. Crazzolara, W. von Münch, M. Nägele
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Volume:
30
Year:
1992
Language:
english
Pages:
7
DOI:
10.1016/0924-4247(92)80127-o
File:
PDF, 940 KB
english, 1992
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