Electrostatic solutions for a capacitive ultrasonic air...

Sensors and Actuators A: Physical 1994 Vol. 45; Iss. 2

Electrostatic solutions for a capacitive ultrasonic air transducer with a uniformly V-grooved backplate

Jarmo Hietanen, J. Ignatius, Jyrki Stor-Pellinen
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Volume:
45
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0924-4247(94)00822-1
File:
PDF, 388 KB
english, 1994
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