Measurements of the mechanical behaviour of micromachined...

Sensors and Actuators A: Physical 1994 Vol. 41; Iss. 1-3

Measurements of the mechanical behaviour of micromachined silicon and silicon-nitride membranes for microphones, pressure sensors and gas flow meters

R. Schellin, G. Hess, W. Kühnel, C. Thielemann, D. Trost, J. Wacker, R. Steinmann
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Volume:
41
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0924-4247(94)80125-8
File:
PDF, 585 KB
english, 1994
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