A micromachined flow sensor for liquid and gaseous fluids
F. Kohl, A. Jachimowicz, J. Steurer, R. Glatz, J. Kuttner, D. Biacovský, F. Olcaytug, G. UrbanVolume:
41
Year:
1994
Language:
english
Pages:
7
DOI:
10.1016/0924-4247(94)80126-6
File:
PDF, 748 KB
english, 1994