Silicon nitride membrane sensors with monocrystalline...

Silicon nitride membrane sensors with monocrystalline transducers

B. Folkmer, P. Steiner, W. Lang
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Volume:
51
Year:
1995
Pages:
5
DOI:
10.1016/0924-4247(95)01073-4
File:
PDF, 655 KB
1995
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